Inventor
KIM CHANG DOL
KR10 patents
Patents
10 patentsUS11111580B2Sep 7, 2021
Apparatus for processing substrate
EUGENE TECHNOLOGY CO LTD4 citations72
US10337103B2Jul 2, 2019
Substrate processing apparatus
EUGENE TECHNOLOGY CO LTD5 citations71
US10229845B2Mar 12, 2019
Substrate treatment apparatus
EUGENE TECHNOLOGY CO LTD4 citations71
US10161036B2Dec 25, 2018
Substrate processing apparatus
EUGENE TECHNOLOGY CO LTD4 citations71
US11183372B2Nov 23, 2021
Batch type plasma substrate processing apparatus
EUGENE TECHNOLOGY CO LTD3 citations70
US10961626B2Mar 30, 2021
Plasma processing apparatus having injection ports at both sides of the ground electrode for batch processing of substrates
EUGENE TECHNOLOGY CO LTD1 citations59
US12555755B2Feb 17, 2026
Batch type substrate processing apparatus
EUGENE TECHNOLOGY CO LTD0 citations47
US11251056B2Feb 15, 2022
Substrate processing system
EUGENE TECHNOLOGY CO LTD0 citations45
US12243724B2Mar 4, 2025
Batch type substrate processing apparatus
EUGENE TECHNOLOGY CO LTD0 citations44
US10793949B2Oct 6, 2020
Substrate processing apparatus and substrate processing method using the same
EUGENE TECHNOLOGY CO LTD0 citations40