Inventor

SUGITA KATSUYUKI

JP49 patents

⚠️ This page may combine multiple inventors who share the name “SUGITA KATSUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUGITA KATSUYUKI

FUJIKIN KK

Pressure type flow control system with flow monitoring

Gas divided flow supplying apparatus for semiconductor manufacturing equipment

Pressure type flow control system with flow monitoring

Pressure-type flow control device and method for preventing overshooting at start of flow control performed by said device

Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same

Method for detecting abnormality in fluid supply line using fluid control apparatus with pressure sensor

Flow rate range variable type flow rate control apparatus

Automatic zero point correction device for a pressure sensor, a pressure control device and a pressure type flow rate control device

Flow rate control method and flow rate control device

Flow rate control device

Piezoelectric-element-driven valve and flow rate control device

Pressure-based flow rate control device and malfunction detection method therefor

Pressure-type flow rate control device

Pressure-type flow controller

Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same

Pressure-type flow rate control device

Piezoelectric element-driven valve and flow rate control device including piezoelectric element-driven valve

Multi-hole orifice plate for flow control, and flow controller using the same

Flow rate signal correction method and flow rate control device employing same

Flow rate range variable type flow rate control apparatus

Flow rate range variable type flow rate control apparatus

Pressure control device

Piezoelectric driven valve, pressure-type flow rate control device, and vaporization supply device

Flow rate control device

Flow rate control device

Fluid control device

Liquid level detection circuit, liquid level meter, container provided with liquid level meter, and vaporizer using container

Flow rate control device and flow rate control method

Flow rate control device and flow rate control method

Pressure-type flow control device and flow control method

Liquid level meter, vaporizer equipped with the same, and liquid level detection method

Self-diagnosis method for flow rate control device

Flow rate control method and flow rate control device

Fluid control device, method for controlling fluid control device, and fluid control system

Pressure-type flow rate control device and flow rate self-diagnosis method using critical expansion condition

Flow meter and flow control device provided therewith

Flow rate control device and flow rate control method wherein an internal command signal is generated by a combination of first order lag process and ramp process

Driving device provided with piezoelectric element deterioration detection circuit and deterioration detection method

Anomaly detection device for fluid controller, anomaly detection system, anamoly detection method, and fluid controller

Vaporization supply apparatus

OHMI TADAHIRO

Gasket type orifice and pressure type flow rate control apparatus for which the orifice is employed

Flow rate range variable type flow rate control apparatus

KONICA MINOLTA INC

Image processing apparatus with malicious code detection processing and control program

Information processing apparatus and data storage program

HIRATA KAORU

Automatic pressure regulator for flow rate regulator

NISHINO KOUJI

Gas supply system for semiconductor manufacturing facilities

NAGASE MASAAKI

Method for detecting malfunction of valve on the downstream side of throttle mechanism of pressure type flow control apparatus

SUGITA KATSUYUKI

Pressure control valve driving circuit for pressure type flow rate control device with flow rate self-diagnosis function

IBM

Apparatus and method for recording and reproducing digital data