Inventor

ROBERTS STEVEN J

US2 patents

⚠️ This page may combine multiple inventors who share the name “ROBERTS STEVEN J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED ENERGY IND INC

1 patent

US6830650B2Dec 14, 2004

Wafer probe for measuring plasma and surface characteristics in plasma processing environments

ADVANCED ENERGY IND INC107 citations96

ADVANCED PLASMA INC

1 patent

US7192505B2Mar 20, 2007

Wafer probe for measuring plasma and surface characteristics in plasma processing environments

ADVANCED PLASMA INC51 citations91