Inventor
CHEN STEPHANIE
US8 patents
⚠️ This page may combine multiple inventors who share the name “CHEN STEPHANIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
4 patentsUS8000922B2Aug 16, 2011
Methods and systems for generating information to be used for selecting values for one or more parameters of a detection algorithm
KLA TENCOR CORP16 citations82
US9715725B2Jul 25, 2017
Context-based inspection for dark field inspection
KLA TENCOR CORP5 citations72
US8831334B2Sep 9, 2014
Segmentation for wafer inspection
KLA TENCOR CORP6 citations72
US8049877B2Nov 1, 2011
Computer-implemented methods, carrier media, and systems for selecting polarization settings for an inspection system
KLA TENCOR CORP1 citations51