Inventor

LEE SEONGSIL

KR2 patents

Patents

2 patents

US10067067B2Sep 4, 2018

Substrate inspection apparatus

SAMSUNG ELECTRONICS CO LTD4 citations66

US10393672B2Aug 27, 2019

System and method of inspecting substrate and method of fabricating semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD2 citations64