Inventor
YAMAMURA HIKARU
JP4 patents
Patents
4 patentsUS10971331B2Apr 6, 2021
Writing data generation method, computer-readable recording medium on which program is recorded, and multi-charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC1 citations54
US9236154B2Jan 12, 2016
Charged-particle beam drawing method, computer-readable recording media, and charged-particle beam drawing apparatus
NUFLARE TECHNOLOGY INC1 citations45
US11556114B2Jan 17, 2023
Drawing apparatus and drawing method
NUFLARE TECHNOLOGY INC0 citations43
US9460892B2Oct 4, 2016
Charged particle beam writing method, computer-readable recording medium, and charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations35