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Inventor
SHINGYOJI TAKAYUKI
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “SHINGYOJI TAKAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO MITSUBISHI SILICON
2 patents
US7067005B2
Jun 27, 2006
Silicon wafer production process and silicon wafer
SUMITOMO MITSUBISHI SILICON
5 citations
60
US7229496B2
Jun 12, 2007
Process for producing silicon single crystal layer and silicon single crystal layer
SUMITOMO MITSUBISHI SILICON
1 citations
50
MITSUBISHI METAL CORP
1 patent
US4411763A
Oct 25, 1983
Sputtering apparatus
MITSUBISHI METAL CORP
28 citations
88