Inventor
NAKATO TATSUO
US11 patents
⚠️ This page may combine multiple inventors who share the name “NAKATO TATSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHARP MICROELECT TECH INC
8 patentsUS5792679AAug 11, 1998
Method for forming silicon-germanium/Si/silicon dioxide heterostructure using germanium implant
SHARP MICROELECT TECH INC235 citations98
US5726459AMar 10, 1998
GE-SI SOI MOS transistor and method of fabricating same
SHARP MICROELECT TECH INC53 citations96
US5436175AJul 25, 1995
Shallow SIMOX processing method using molecular ion implantation
SHARP MICROELECT TECH INC97 citations94
US5545512AAug 13, 1996
Method of forming a pattern of silylated planarizing photoresist
SHARP MICROELECT TECH INC24 citations92
US5756256AMay 26, 1998
Silylated photo-resist layer and planarizing method
SHARP MICROELECT TECH INC30 citations91
US5608252AMar 4, 1997
Semiconductor with implanted dielectric layer having patched pin-holes
SHARP MICROELECT TECH INC13 citations73
US5514897AMay 7, 1996
Graded implantation of oxygen and/or nitrogen constituents to define buried isolation region in semiconductor devices
SHARP MICROELECT TECH INC11 citations73
US5278077AJan 11, 1994
Pin-hole patch method for implanted dielectric layer
SHARP MICROELECT TECH INC14 citations73