Inventor
CHENG HSU-LI
TW6 patents
Patents
6 patentsUS5773199AJun 30, 1998
Method for controlling linewidth by etching bottom anti-reflective coating
VANGUARD INT SEMICONDUCT CORP96 citations93
US6001704ADec 14, 1999
Method of fabricating a shallow trench isolation by using oxide/oxynitride layers
VANGUARD INT SEMICONDUCT CORP22 citations92
US5643824AJul 1, 1997
Method of forming nitride sidewalls having spacer feet in a locos process
VANGUARD INT SEMICONDUCT CORP20 citations91
US6159821ADec 12, 2000
Methods for shallow trench isolation
VANGUARD INT SEMICONDUCT CORP10 citations73
US6762096B1Jul 13, 2004
Method for forming a polysilicon spacer with a vertical profile
VANGUARD INT SEMICONDUCT CORP3 citations54
US5932115AAug 3, 1999
Method of manufacturing a crown shape capacitor
VANGUARD INT SEMICONDUCT CORP1 citations47