Inventor
KEIJSERS GERARDUS JOHANNES JOS
NL2 patents
Patents
2 patentsUS7420676B2Sep 2, 2008
Alignment method, method of measuring front to backside alignment error, method of detecting non-orthogonality, method of calibration, and lithographic apparatus
ASML NETHERLANDS BV19 citations78
US7253077B2Aug 7, 2007
Substrate, method of preparing a substrate, method of measurement, lithographic apparatus, device manufacturing method and device manufactured thereby, and machine-readable storage medium
ASML NETHERLANDS BV2 citations58