Inventor
TAPPAN JIM
US2 patents
Patents
2 patentsUS7431788B2Oct 7, 2008
Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system
LAM RES CORP36 citations90
US7998296B2Aug 16, 2011
Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system
LAM RES CORP6 citations66