Inventor

VAN DER PASCH ENGELBERTUS ANTONIUS FRANCISCUS

NL3 patents

⚠️ This page may combine multiple inventors who share the name “VAN DER PASCH ENGELBERTUS ANTONIUS FRANCISCUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BUTLER HANS

1 patent

US9746312B2Aug 29, 2017

Lithographic apparatus and method for measuring a position

BUTLER HANS2 citations69

ASML NETHERLANDS BV

1 patent

US7557903B2Jul 7, 2009

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV4 citations57

ASML NETHERLAND BV

1 patent

US7804584B2Sep 28, 2010

Integrated circuit manufacturing methods with patterning device position determination

ASML NETHERLAND BV0 citations47