Inventor · disambiguated record
Satoko Seta
Also filed as: SETA SATOKO
2 granted patents·5 pending applications·11 citations·filing 2004–2013
55Inventor score
Top patents by PatentIndex Score
7 records- 0181US7435682B2Method of manufacturing semiconductor deviceTOSHIBA KK·Filed 2005·Granted Oct 14, 2008·8 cites·20 claims
- 0267US8114776B2Method of manufacturing semiconductor deviceEDA HAJIME·Filed 2010·Granted Feb 14, 2012·3 cites·21 claims
- 0355US2013220377A1Method of cleaning a film-forming apparatusAIR LIQUIDE US·Filed 2013·Application pending·0 cites
- 0443US2005082002A1Method of cleaning a film-forming apparatus and film-forming apparatusFiled 2004·Application pending·0 cites
- 0543US2009258493A1Semiconductor device manufacturing methodMATSUI YUKITERU·Filed 2009·Application pending·0 cites
- 0631US2011070745A1Polishing method, polishing apparatus, and manufacturing method of semiconductor deviceMATSUI YUKITERU·Filed 2010·Application pending·0 cites
- 0729US2010240285A1Polishing apparatus and method of manufacturing semiconductor device using the sameSETA SATOKO·Filed 2010·Application pending·0 cites
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