Inventor

Hwang chang wan

US2 patents

⚠️ This page may combine multiple inventors who share the name “Hwang chang wan”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEE SANG IN

1 patent

US8771791B2Jul 8, 2014

Deposition of layer using depositing apparatus with reciprocating susceptor

LEE SANG IN338 citations96

VEECO ALD INC

1 patent

US9376455B2Jun 28, 2016

Molecular layer deposition using reduction process

VEECO ALD INC17 citations81