Inventor
HIGASHINO KATSUKO
US2 patents
Patents
2 patentsUS8815751B2Aug 26, 2014
Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium
HITACHI INT ELECTRIC INC4 citations70
US9396929B2Jul 19, 2016
Method of manufacturing a semiconductor device, substrate processing apparatus and recording medium
HITACHI INT ELECTRIC INC0 citations39