Inventor · disambiguated record

Shigenobu Akiyama

Also filed as: AKIYAMA SHIGENOBU

3 granted patents·578 citations·filing 1983–1989

80Inventor score

Technology areasH10D H10P H10W

Files withAGENCY IND SCIENCE TECHN2 MATSUSHITA ELECTRIC INDUSTRIAL CO LTD1

Top patents by PatentIndex Score

3 records

0197US4487635AMethod of fabricating a multi-layer type semiconductor device including crystal growth by spirally directing energy beamAGENCY IND SCIENCE TECHN·Filed 1983·Granted Dec 11, 1984·289 cites·10 claims
0296US5191405AThree-dimensional stacked lsiMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1989·Granted Mar 2, 1993·252 cites·4 claims
0381US4596604AMethod of manufacturing a multilayer semiconductor deviceAGENCY IND SCIENCE TECHN·Filed 1984·Granted Jun 24, 1986·37 cites·16 claims

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