Inventor
DE GROOT SIMON
NL6 patents
⚠️ This page may combine multiple inventors who share the name “DE GROOT SIMON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
4 patentsUS7403264B2Jul 22, 2008
Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus
ASML NETHERLANDS BV24 citations90
US7262831B2Aug 28, 2007
Lithographic projection apparatus and device manufacturing method using such lithographic projection apparatus
ASML NETHERLANDS BV38 citations90
US7626684B2Dec 1, 2009
Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus
ASML NETHERLANDS BV14 citations80
US7889316B2Feb 15, 2011
Method for patterning a radiation beam, patterning device for patterning a radiation beam
ASML NETHERLANDS BV0 citations50