Inventor

EWERT MAURICE E

US9 patents

⚠️ This page may combine multiple inventors who share the name “EWERT MAURICE E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

5 patents

US7018515B2Mar 28, 2006

MILLER KEITH A

1 patent

US8685215B2Apr 1, 2014

Mechanism for continuously varying radial position of a magnetron

MILLER KEITH A5 citations82

EWERT MAURICE E

1 patent

US8404048B2Mar 26, 2013

Off-angled heating of the underside of a substrate using a lamp assembly

EWERT MAURICE E12 citations79

GOEL ASHISH

1 patent

US10504719B2Dec 10, 2019

Cooled reflective adapter plate for a deposition chamber

GOEL ASHISH3 citations72

WANG RONGJUN

1 patent

US8992741B2Mar 31, 2015

Method for ultra-uniform sputter deposition using simultaneous RF and DC power on target

WANG RONGJUN1 citations50

EWERT MAURICE E

APPLIED MATERIALS INC

Selectable dual position magnetron

Magnetron having continuously variable radial position

Off-angled heating of the underside of a substrate using a lamp assembly

Cooled reflective adapter plate for a deposition chamber

Off-angled heating of the underside of a substrate using a lamp assembly

MILLER KEITH A

Mechanism for continuously varying radial position of a magnetron

EWERT MAURICE E

Off-angled heating of the underside of a substrate using a lamp assembly

GOEL ASHISH

Cooled reflective adapter plate for a deposition chamber

WANG RONGJUN

Method for ultra-uniform sputter deposition using simultaneous RF and DC power on target