P

Inventor

DE BOEIJ JEROEN

NL7 patents
⚠️ This page may combine multiple inventors who share the name “DE BOEIJ JEROEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KULICKE & SOFFA LITEQ B V

3 patents
US11550232B2Jan 10, 2023

Lithographic systems and methods of operating the same

KULICKE & SOFFA LITEQ B V4 citations67
US11947271B2Apr 2, 2024

Lithographic systems and methods of operating the same

KULICKE & SOFFA LITEQ B V0 citations55
US11921435B2Mar 5, 2024

Lithographic systems and methods of operating the same

KULICKE & SOFFA LITEQ B V0 citations55

HOL SVEN ANTOIN JOHAN

2 patents
US9081307B2Jul 14, 2015

Variable reluctance device, stage apparatus, lithographic apparatus and device manufacturing method

HOL SVEN ANTOIN JOHAN3 citations55
US8687171B2Apr 1, 2014

Electromagnetic actuator, stage apparatus and lithographic apparatus

HOL SVEN ANTOIN JOHAN0 citations36

VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS

1 patent
US8932042B2Jan 13, 2015

Lithographic apparatus and device manufacturing method

VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS1 citations49

FEI CO

1 patent
US9875879B2Jan 23, 2018

Charged particle microscope with vibration detection / correction

FEI CO0 citations38