Inventor
KAWAGUCHI MICHINORI
JP4 patents
⚠️ This page may combine multiple inventors who share the name “KAWAGUCHI MICHINORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
3 patentsUS7353076B2Apr 1, 2008
Vacuum processing method and vacuum processing apparatus
HITACHI HIGH TECH CORP14 citations80
US8588962B2Nov 19, 2013
Vacuum processing device and method of transporting process subject member
HITACHI HIGH TECH CORP1 citations48
US9257318B2Feb 9, 2016
Operation method for vacuum processing apparatus
HITACHI HIGH TECH CORP0 citations37