Inventor
PARK GUN-JOO
KR4 patents
Patents
4 patentsUS11390635B2Jul 19, 2022
Composition for depositing silicon-containing thin film and method for producing silicon-containing thin film using the same
DNF CO LTD3 citations70
US11319333B2May 3, 2022
Disilylamine compound, method for preparing the same, and composition for depositing silicon-containing thin film including the same
DNF CO LTD0 citations60
US10894799B2Jan 19, 2021
Composition for depositing silicon-containing thin film including disilylamine compound and method for manufacturing silicon-containing thin film using the same
DNF CO LTD1 citations60
US12398459B2Aug 26, 2025
Silicon metal oxide encapsulation film comprising metal or metal oxide in thin film, and manufacturing method therefor
DNF CO LTD0 citations58