Inventor · disambiguated record
Edwin G. Millis
Also filed as: MILLIS EDWIN G · MILLIS EDWIN GRAHAM
9 granted patents·665 citations·filing 1973–1992
92Inventor score
Files withTEXAS INSTRUMENTS INC9
Top patents by PatentIndex Score
9 records- 0198US4027686AMethod and apparatus for cleaning the surface of a semiconductor slice with a liquid spray of de-ionized waterTEXAS INSTRUMENTS INC·Filed 1973·Granted Jun 7, 1977·220 cites·8 claims
- 0294US4851311AProcess for determining photoresist develop time by optical transmissionTEXAS INSTRUMENTS INC·Filed 1987·Granted Jul 25, 1989·112 cites·17 claims
- 0389US4857430AProcess and system for determining photoresist development endpoint by effluent analysisTEXAS INSTRUMENTS INC·Filed 1987·Granted Aug 15, 1989·67 cites·11 claims
- 0482US4609103ASemiconductor slice cassette carrierTEXAS INSTRUMENTS INC·Filed 1984·Granted Sep 2, 1986·71 cites·5 claims
- 0575US5217053AVented vacuum semiconductor wafer cassetteTEXAS INSTRUMENTS INC·Filed 1992·Granted Jun 8, 1993·64 cites·10 claims
- 0670US5137063AVented vacuum semiconductor wafer cassetteTEXAS INSTRUMENTS INC·Filed 1990·Granted Aug 11, 1992·55 cites·7 claims
- 0764US4777804AMethod and apparatus for easing surface particle removal by size increaseTEXAS INSTRUMENTS INC·Filed 1987·Granted Oct 18, 1988·31 cites·27 claims
- 0861US4636128ASemiconductor slice cassette transport unitTEXAS INSTRUMENTS INC·Filed 1984·Granted Jan 13, 1987·29 cites·16 claims
- 0952US4857750ASensor for determining photoresist developer strengthTEXAS INSTRUMENTS INC·Filed 1987·Granted Aug 15, 1989·16 cites·8 claims
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