Inventor
KAWANABE YASUNORI
JP13 patents
Patents
13 patentsUS5886863AMar 23, 1999
Wafer support member
KYOCERA CORP312 citations98
US6133557AOct 17, 2000
Wafer holding member
KYOCERA CORP161 citations97
US5677253AOct 14, 1997
Wafer holding member
KYOCERA CORP16 citations70
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Electrostatic chuck and method for manufacturing same
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Structural body and heating apparatus
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US12016087B2Jun 18, 2024
Heater and method of production of same
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US12525472B2Jan 13, 2026
Structure and heating device
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US12142498B2Nov 12, 2024
Ceramic structure and wafer system
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US11856659B2Dec 26, 2023
Board-like structure and heater system
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US11818813B2Nov 14, 2023
Wafer-use member, wafer-use system, and method for manufacturing wafer-use member
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US12550231B2Feb 10, 2026
Ceramic structure and method manufacturing ceramic structure
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US12452961B2Oct 21, 2025
Ceramic structure and wafer system
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US12238827B2Feb 25, 2025
Base structure and wafer placing device
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