Inventor
HAMANO KATSUYOSHI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “HAMANO KATSUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
3 patentsUS7767053B2Aug 3, 2010
Substrate processing apparatus and substrate processing method
HITACHI INT ELECTRIC INC14 citations79
US9646862B2May 9, 2017
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
HITACHI INT ELECTRIC INC1 citations50
US9472424B2Oct 18, 2016
Substrate processing apparatus and a method of manufacturing a semiconductor device
HITACHI INT ELECTRIC INC0 citations50