Inventor
HUANG TUNG-WANG
TW4 patents
Patents
4 patentsUS6770563B2Aug 3, 2004
Process of forming a bottle-shaped trench
NANYA TECHNOLOGY CORP11 citations71
US6867089B2Mar 15, 2005
Method of forming a bottle-shaped trench in a semiconductor substrate
NANYA TECHNOLOGY CORP5 citations61
US6743728B2Jun 1, 2004
Method for forming shallow trench isolation
NANYA TECHNOLOGY CORP5 citations61
US6693006B2Feb 17, 2004
Method for increasing area of a trench capacitor
NANYA TECHNOLOGY CORP5 citations61