Inventor

BOGART JEFF A

US4 patents

⚠️ This page may combine multiple inventors who share the name “BOGART JEFF A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

1 patent

US7928366B2Apr 19, 2011

Methods of and apparatus for accessing a process chamber using a dual zone gas injector with improved optical access

LAM RES CORP7 citations81

BROWN DANIEL ARTHUR

1 patent

US9076634B2Jul 7, 2015

Replaceable upper chamber parts of plasma processing apparatus

BROWN DANIEL ARTHUR9 citations76

NOVELLUS SYSTEMS INC

1 patent

US7201829B2Apr 10, 2007

Mask plate design

NOVELLUS SYSTEMS INC5 citations61

BOGART JEFF A

1 patent

US8524099B2Sep 3, 2013

Methods for accessing a process chamber using a dual zone gas injector with improved optical access

BOGART JEFF A2 citations54