Inventor

FRAGNIERE BENOIT

CH4 patents

Patents

4 patents

US9214801B2Dec 15, 2015

Power supply device for plasma processing

BULLIARD ALBERT10 citations80

US8854781B2Oct 7, 2014

Power supply device for plasma processing

BULLIARD ALBERT7 citations80

US8837100B2Sep 16, 2014

Power supply device for plasma processing

BULLIARD ALBERT9 citations79

US8542471B2Sep 24, 2013

Power supply device for plasma processing

BULLIARD ALBERT10 citations79