Inventor

KOBAYASHI TAMIHIRO

JP4 patents

⚠️ This page may combine multiple inventors who share the name “KOBAYASHI TAMIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM JAPAN

2 patents

US7690881B2Apr 6, 2010

Substrate-processing apparatus with buffer mechanism and substrate-transferring apparatus

ASM JAPAN523 citations97

US7799134B2Sep 21, 2010

Shower plate having projections and plasma CVD apparatus using same

ASM JAPAN1 citations51

TOKYO ELECTRON LTD

2 patents

US10867819B2Dec 15, 2020

Vacuum processing apparatus, vacuum processing system and vacuum processing method

TOKYO ELECTRON LTD1 citations60

US12094694B2Sep 17, 2024

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD0 citations49