Inventor
SCHATZ ENNO
DE2 patents
Patents
2 patentsUS12235576B2Feb 25, 2025
Method and apparatus for manufacturing nanostructures from a material layer having a thickness below 1 μm
UNIV WUERZBURG J MAXIMILIANS0 citations46
US12426436B2Sep 23, 2025
Emission of electromagnetic radiation and control of the properties of the emitted electromagnetic radiation
UNIV WUERZBURG J MAXIMILIANS0 citations45