Inventor

SIMPSON CRAIG R

US6 patents

⚠️ This page may combine multiple inventors who share the name “SIMPSON CRAIG R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MRS TECHNOLOGY INC

3 patents

US5677758AOct 14, 1997

Lithography System using dual substrate stages

MRS TECHNOLOGY INC136 citations94

US5828142AOct 27, 1998

Platen for use with lithographic stages and method of making same

MRS TECHNOLOGY INC51 citations93

US4855792AAug 8, 1989

Optical alignment system for use in photolithography and having reduced reflectance errors

MRS TECHNOLOGY INC20 citations80

DONAHER J CASEY

1 patent

US8395783B2Mar 12, 2013

System metrology core

DONAHER J CASEY10 citations75

AZORES CORP

1 patent

US6483572B2Nov 19, 2002

Reticle alignment system for use in lithography

AZORES CORP6 citations68

(unassigned)

1 patent

US6320644B1Nov 20, 2001

Reticle alignment system for use in lithography

6 citations62