Inventor
NORRBAKHSH HAMID
US2 patents
Patents
2 patentsUS6353210B1Mar 5, 2002
Correction of wafer temperature drift in a plasma reactor based upon continuous wafer temperature measurements using and in-situ wafer temperature optical probe
APPLIED MATERIALS INC85 citations95
US6575622B2Jun 10, 2003
Correction of wafer temperature drift in a plasma reactor based upon continuous wafer temperature measurements using an in-situ wafer temperature optical probe
APPLIED MATERIALS INC31 citations90