Inventor
MAYS BRAD
US3 patents
⚠️ This page may combine multiple inventors who share the name “MAYS BRAD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
2 patentsUS6353210B1Mar 5, 2002
Correction of wafer temperature drift in a plasma reactor based upon continuous wafer temperature measurements using and in-situ wafer temperature optical probe
APPLIED MATERIALS INC85 citations95
US6575622B2Jun 10, 2003
Correction of wafer temperature drift in a plasma reactor based upon continuous wafer temperature measurements using an in-situ wafer temperature optical probe
APPLIED MATERIALS INC31 citations90