Inventor

MORITA ETSUYA

US3 patents

⚠️ This page may combine multiple inventors who share the name “MORITA ETSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAKUMI TECHNOLOGY CORP

1 patent

US7523429B2Apr 21, 2009

System for designing integrated circuits with enhanced manufacturability

TAKUMI TECHNOLOGY CORP273 citations97

NIKON PRECISION INC

1 patent

US5835227ANov 10, 1998

Method and apparatus for determining performance characteristics in lithographic tools

NIKON PRECISION INC48 citations91

NIKON PREC INC

1 patent

US6974653B2Dec 13, 2005

Methods for critical dimension and focus mapping using critical dimension test marks

NIKON PREC INC26 citations81