Inventor
HORN JAN
DE27 patents
⚠️ This page may combine multiple inventors who share the name “HORN JAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
20 patentsUS9851555B2Dec 26, 2017
Optical component
ZEISS CARL SMT GMBH3 citations68
US10678151B2Jun 9, 2020
Control device
ZEISS CARL SMT GMBH4 citations66
US10139618B2Nov 27, 2018
Multi-mirror array
ZEISS CARL SMT GMBH3 citations63
US9897925B2Feb 20, 2018
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH1 citations62
US9239229B2Jan 19, 2016
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH1 citations62
US11504855B2Nov 22, 2022
System, method and marker for the determination of the position of a movable object in space
ZEISS CARL SMT GMBH0 citations61
US11402760B2Aug 2, 2022
Optical arrangement and lithography apparatus
ZEISS CARL SMT GMBH0 citations52
US9019475B2Apr 28, 2015
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations52
US9001309B2Apr 7, 2015
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations52
US10061202B2Aug 28, 2018
Methods and devices for driving micromirrors
ZEISS CARL SMT GMBH0 citations49
US8345224B2Jan 1, 2013
Methods and devices for driving micromirrors
ZEISS CARL SMT GMBH1 citations49
US12276917B2Apr 15, 2025
Mirror, in particular for microlithography
ZEISS CARL SMT GMBH0 citations48
US11262660B2Mar 1, 2022
Image sensor, position sensor device, lithography system, and method for operating an image sensor
ZEISS CARL SMT GMBH0 citations47
US10018803B2Jul 10, 2018
Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement
ZEISS CARL SMT GMBH0 citations47
US10007195B2Jun 26, 2018
Device for determining a tilt angle of at least one mirror of a lithography system, and method
ZEISS CARL SMT GMBH0 citations45
US10514619B2Dec 24, 2019
Sensor arrangement for a lithography system, lithography system, and method for operating a lithography system
ZEISS CARL SMT GMBH0 citations39
US10459351B2Oct 29, 2019
Device for transmitting electrical signals, and lithography apparatus
ZEISS CARL SMT GMBH0 citations39
US10444633B2Oct 15, 2019
Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system
ZEISS CARL SMT GMBH0 citations39
US10437155B2Oct 8, 2019
Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system
ZEISS CARL SMT GMBH0 citations39
US9599788B2Mar 21, 2017
Optical module
ZEISS CARL SMT GMBH0 citations38
CARL ZEISS MULTISEM GMBH
2 patentsXALTER STEFAN
2 patentsUS9013684B2Apr 21, 2015
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
XALTER STEFAN17 citations91
US8339577B2Dec 25, 2012
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
XALTER STEFAN9 citations82