P

Inventor

TOLLNER MARTIN ERNST

GB6 patents
⚠️ This page may combine multiple inventors who share the name “TOLLNER MARTIN ERNST”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOLLNER MARTIN ERNST

3 patents
US8662841B2Mar 4, 2014

Vacuum pump

TOLLNER MARTIN ERNST7 citations80
US8070459B2Dec 6, 2011

Pressure control method

TOLLNER MARTIN ERNST7 citations79
US9309892B2Apr 12, 2016

Vacuum pump

TOLLNER MARTIN ERNST5 citations68

EDWARDS LTD

1 patent
US7814922B2Oct 19, 2010

Apparatus for controlling the pressure in a process chamber and method of operating same

EDWARDS LTD14 citations81

BREWSTER BARRIE DUDLEY

1 patent
US8851829B2Oct 7, 2014

Vacuum pump

BREWSTER BARRIE DUDLEY6 citations80

Edward ltd

1 patent
US9759256B2Sep 12, 2017

Vacuum pump

Edward ltd1 citations42