Inventor
SHUGRUE JOHN
US6 patents
⚠️ This page may combine multiple inventors who share the name “SHUGRUE JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
4 patentsUS9404587B2Aug 2, 2016
Lockout tagout for semiconductor vacuum valve
ASM IP HOLDING BV494 citations93
US10900122B2Jan 26, 2021
Apparatus for semiconductor wafer processing
ASM IP HOLDING BV7 citations82
US10767789B2Sep 8, 2020
Diaphragm valves, valve components, and methods for forming valve components
ASM IP HOLDING BV4 citations71
US10975470B2Apr 13, 2021
Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment
ASM IP HOLDING BV1 citations62