Inventor
BASTANI VAHID
NL6 patents
Patents
6 patentsUS10816904B2Oct 27, 2020
Method for determining contribution to a fingerprint
ASML NETHERLANDS BV2 citations70
US12045555B2Jul 23, 2024
Method to label substrates based on process parameters
ASML NETHERLANDS BV0 citations60
US11378891B2Jul 5, 2022
Method for determining contribution to a fingerprint
ASML NETHERLANDS BV1 citations59
US11320743B2May 3, 2022
Method to label substrates based on process parameters
ASML NETHERLANDS BV0 citations59
US11099485B2Aug 24, 2021
Maintaining a set of process fingerprints
ASML NETHERLANDS BV0 citations57
US12353967B2Jul 8, 2025
Method and apparatus for determining feature contribution to performance
ASML NETHERLANDS BV0 citations53