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Inventor
ARAI TETSUYUKI
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “ARAI TETSUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
1 patent
US7872745B2
Jan 18, 2011
Pattern inspection apparatus and pattern inspection method
NUFLARE TECHNOLOGY INC
9 citations
82
NIKON CORP
1 patent
US4870693A
Sep 26, 1989
Mask inspecting apparatus
NIKON CORP
8 citations
69