Inventor
TAKEMOTO SHIGERU
JP4 patents
Patents
4 patentsUS6184526B1Feb 6, 2001
Apparatus and method for inspecting predetermined region on surface of specimen using electron beam
NIKON CORP120 citations96
US5764361AJun 9, 1998
Interferometer, adjusting method therefor, stage apparatus having the interferometer, and exposure apparatus having the stage apparatus
NIKON CORP102 citations96
US5200841AApr 6, 1993
Apparatus for binarizing images
NIKON CORP34 citations87
US4870693ASep 26, 1989
Mask inspecting apparatus
NIKON CORP8 citations69