Inventor

HOLZWARTH HEINZ

DE6 patents

⚠️ This page may combine multiple inventors who share the name “HOLZWARTH HEINZ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OLIN MICROELECTRONIC CHEM INC

2 patents

US5714559AFeb 3, 1998

Crosslinked polymers

OLIN MICROELECTRONIC CHEM INC16 citations80

US5834531ANov 10, 1998

Crosslinked polymers

OLIN MICROELECTRONIC CHEM INC5 citations60

CIBA SC HOLDING AG

1 patent

US5759740AJun 2, 1998

High resolution i-line photoresist of high sensitivity

CIBA SC HOLDING AG26 citations92

CIBA GEIGY CORP

1 patent

US5627011AMay 6, 1997

High resolution i-line photoresist of high sensitivity

CIBA GEIGY CORP43 citations92

OCG MICROELECTRONIC MATERIALS

1 patent

US5558978ASep 24, 1996

Photoresist compositions containing copolymers having acid-labile groups and recurring units derived from either N-(hydroxymethyl)maleimide or N-(acetoxymethyl)maleimide or both

OCG MICROELECTRONIC MATERIALS44 citations91

(unassigned)

1 patent

US5650262AJul 22, 1997

High-resolution negative photoresist with wide process latitude

11 citations72