Inventor
MATTAAR THOMAS AUGUSTUS
NL10 patents
⚠️ This page may combine multiple inventors who share the name “MATTAAR THOMAS AUGUSTUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS6977461B2Dec 20, 2005
System and method for moving an object employing piezo actuators
ASML NETHERLANDS BV24 citations87
US7173363B2Feb 6, 2007
System and method for moving an object employing piezo actuators
ASML NETHERLANDS BV20 citations85
US11105619B2Aug 31, 2021
Measurement apparatus
ASML NETHERLANDS BV3 citations70
US11874103B2Jan 16, 2024
Measurement apparatus
ASML NETHERLANDS BV0 citations60
US12405542B2Sep 2, 2025
Method of determining a mark measurement sequence, stage apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations51
US10627721B2Apr 21, 2020
Lithography apparatus, and a method of manufacturing a device
ASML NETHERLANDS BV0 citations36
US7224428B2May 29, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations33
COX HENRIKUS HERMAN MARIE
3 patentsUS8102513B2Jan 24, 2012
Method for positioning an object by an electromagnetic motor, stage apparatus and lithographic apparatus
COX HENRIKUS HERMAN MARIE3 citations59
US8982327B2Mar 17, 2015
Method for positioning an object by an electromagnetic motor, stage apparatus and lithographic apparatus
COX HENRIKUS HERMAN MARIE0 citations48
US8681316B2Mar 25, 2014
Measurement system, method and lithographic apparatus
COX HENRIKUS HERMAN MARIE0 citations42