Inventor

LEENHEERS GERARDUS JACOBUS COR

NL2 patents

Patents

2 patents

US6977461B2Dec 20, 2005

System and method for moving an object employing piezo actuators

ASML NETHERLANDS BV24 citations87

US7173363B2Feb 6, 2007

System and method for moving an object employing piezo actuators

ASML NETHERLANDS BV20 citations85