Inventor
BECKER JILL
US3 patents
Patents
3 patentsUS6969539B2Nov 29, 2005
Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxide
HARVARD COLLEGE88 citations97
US7560581B2Jul 14, 2009
Vapor deposition of tungsten nitride
HARVARD COLLEGE22 citations91
US8008743B2Aug 30, 2011
Vapor deposition of silicon dioxide nanolaminates
HARVARD COLLEGE4 citations61