P

Inventor

BAMNOLKER HANNA

US23 patents
⚠️ This page may combine multiple inventors who share the name “BAMNOLKER HANNA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

16 patents
US10573522B2Feb 25, 2020

Method for preventing line bending during metal fill process

LAM RES CORP38 citations96
US9595470B2Mar 14, 2017

Methods of preparing tungsten and tungsten nitride thin films using tungsten chloride precursor

LAM RES CORP27 citations94
US11355345B2Jun 7, 2022

Method for preventing line bending during metal fill process

LAM RES CORP21 citations93
US10777453B2Sep 15, 2020

Low resistivity films containing molybdenum

LAM RES CORP18 citations93
US10510590B2Dec 17, 2019

Low resistivity films containing molybdenum

LAM RES CORP26 citations93
US9978605B2May 22, 2018

Method of forming low resistivity fluorine free tungsten film without nucleation

LAM RES CORP23 citations93
US11970776B2Apr 30, 2024

Atomic layer deposition of metal films

LAM RES CORP9 citations85
US11549175B2Jan 10, 2023

Method of depositing tungsten and other metals in 3D NAND structures

LAM RES CORP17 citations85
US9953984B2Apr 24, 2018

Tungsten for wordline applications

LAM RES CORP12 citations84
US10546751B2Jan 28, 2020

Forming low resistivity fluorine free tungsten film without nucleation

LAM RES CORP8 citations83
US9589808B2Mar 7, 2017

Method for depositing extremely low resistivity tungsten

LAM RES CORP17 citations83
US12351914B2Jul 8, 2025

Deposition of films using molybdenum precursors

LAM RES CORP2 citations74
US12362188B2Jul 15, 2025

Method for preventing line bending during metal fill process

LAM RES CORP2 citations73
US10214807B2Feb 26, 2019

Atomic layer deposition of tungsten for enhanced fill and reduced substrate attack

LAM RES CORP3 citations71
US10529722B2Jan 7, 2020

Tungsten for wordline applications

LAM RES CORP1 citations62
US11225712B2Jan 18, 2022

Atomic layer deposition of tungsten for enhanced fill and reduced substrate attack

LAM RES CORP0 citations60

CYPRESS SEMICONDUCTOR CORP

5 patents

UNIV BAR ILAN

1 patent

LAM RES CORPORATION

1 patent