Inventor
VAN CLEEMPUT PATRICK
US14 patents
⚠️ This page may combine multiple inventors who share the name “VAN CLEEMPUT PATRICK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
10 patentsUS11183383B2Nov 23, 2021
Tin oxide thin film spacers in semiconductor device manufacturing
LAM RES CORP16 citations93
US11637037B2Apr 25, 2023
Method to create air gaps
LAM RES CORP12 citations85
US11670516B2Jun 6, 2023
Metal-containing passivation for high aspect ratio etch
LAM RES CORP3 citations72
US10246774B2Apr 2, 2019
Additive for ALD deposition profile tuning in gap features
LAM RES CORP4 citations71
US11887846B2Jan 30, 2024
Deposition tool and method for depositing metal oxide films on organic materials
LAM RES CORP0 citations62
US12274047B2Apr 8, 2025
Line bending control for memory applications
LAM RES CORP0 citations60
US11864372B2Jan 2, 2024
Line bending control for memory applications
LAM RES CORP1 citations60
US12331396B2Jun 17, 2025
Systems and methods for homogenous intermixing of precursors in alloy atomic layer deposition
LAM RES CORP0 citations59
US11827976B2Nov 28, 2023
Systems and methods for homogenous intermixing of precursors in alloy atomic layer deposition
LAM RES CORP0 citations59
US10777386B2Sep 15, 2020
Methods for controlling plasma glow discharge in a plasma chamber
LAM RES CORP0 citations39
NOVELLUS SYSTEMS INC
3 patentsUS6258653B1Jul 10, 2001
Silicon nitride barrier for capacitance maximization of tantalum oxide capacitor
NOVELLUS SYSTEMS INC23 citations86
US6225169B1May 1, 2001
High density plasma nitridation as diffusion barrier and interface defect densities reduction for gate dielectric
NOVELLUS SYSTEMS INC12 citations69
US7700155B1Apr 20, 2010
Method and apparatus for modulation of precursor exposure during a pulsed deposition process
NOVELLUS SYSTEMS INC2 citations60