Inventor

MATSUI BUNYA

5 patents

⚠️ This page may combine multiple inventors who share the name “MATSUI BUNYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON SALES CO INC

3 patents

US6403410B1Jun 11, 2002

Plasma doping system and plasma doping method

CANON SALES CO INC32 citations92

US5286681AFeb 15, 1994

Method for manufacturing semiconductor device having a self-planarizing film

CANON SALES CO INC48 citations91

US6435196B1Aug 20, 2002

Impurity processing apparatus and method for cleaning impurity processing apparatus

CANON SALES CO INC14 citations81

FUJITSU LTD

1 patent

US3979241ASep 7, 1976

Method of etching films of silicon nitride and silicon dioxide

FUJITSU LTD67 citations95

SEMICONDUCTOR PROCESS LAB CO

1 patent

US6207537B1Mar 27, 2001

Method for formation of impurity region in semiconductor layer and apparatus for introducing impurity to semiconductor layer

SEMICONDUCTOR PROCESS LAB CO6 citations57