Inventor
BABIAN FRED
US4 patents
Patents
4 patentsUS5973323AOct 26, 1999
Apparatus and method for secondary electron emission microscope
KLA TENCOR CORP138 citations97
US6087659AJul 11, 2000
Apparatus and method for secondary electron emission microscope
KLA TENCOR CORP44 citations94
US6713759B2Mar 30, 2004
Apparatus and method for secondary electron emission microscope
KLA TENCOR CORP2 citations61
US6984822B2Jan 10, 2006
Apparatus and method for secondary electron emission microscope
KLA TENCOR CORP0 citations50