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Inventor
SEGAWA TOHRU
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “SEGAWA TOHRU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HERAEUS QUARZGLAS
2 patents
US6869898B2
Mar 22, 2005
Quartz glass jig for processing apparatus using plasma
HERAEUS QUARZGLAS
79 citations
97
US6680455B2
Jan 20, 2004
Plasma resistant quartz glass jig
HERAEUS QUARZGLAS
2 citations
61
SHINETSU QUARTZ PROD
1 patent
US7841211B2
Nov 30, 2010
Production process of synthetic quartz glass
SHINETSU QUARTZ PROD
13 citations
81
(unassigned)
1 patent
US5876473A
Mar 2, 1999
Method of producing cristobalite containing silica glass
13 citations
71