Inventor
WU FREDERICK C
US8 patents
⚠️ This page may combine multiple inventors who share the name “WU FREDERICK C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS6939804B2Sep 6, 2005
Formation of composite tungsten films
APPLIED MATERIALS INC116 citations98
US6524952B1Feb 25, 2003
Method of forming a titanium silicide layer on a substrate
APPLIED MATERIALS INC170 citations97
US7682946B2Mar 23, 2010
Apparatus and process for plasma-enhanced atomic layer deposition
APPLIED MATERIALS INC40 citations96
US7605083B2Oct 20, 2009
Formation of composite tungsten films
APPLIED MATERIALS INC39 citations95
US7384867B2Jun 10, 2008
Formation of composite tungsten films
APPLIED MATERIALS INC16 citations92
US7833358B2Nov 16, 2010
Method of recovering valuable material from exhaust gas stream of a reaction chamber
APPLIED MATERIALS INC17 citations84