Inventor
RYBNICEK KIMON
US6 patents
⚠️ This page may combine multiple inventors who share the name “RYBNICEK KIMON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INNOVATIVE MICRO TECHNOLOGY
5 patentsUS7528691B2May 5, 2009
Dual substrate electrostatic MEMS switch with hermetic seal and method of manufacture
INNOVATIVE MICRO TECHNOLOGY32 citations87
US7675162B2Mar 9, 2010
Interconnect structure using through wafer vias and method of fabrication
INNOVATIVE MICRO TECHNOLOGY17 citations83
US7864006B2Jan 4, 2011
MEMS plate switch and method of manufacture
INNOVATIVE MICRO TECHNOLOGY15 citations81
US7785913B2Aug 31, 2010
System and method for forming moveable features on a composite substrate
INNOVATIVE MICRO TECHNOLOGY11 citations81
US7233048B2Jun 19, 2007
MEMS device trench plating process and apparatus for through hole vias
INNOVATIVE MICRO TECHNOLOGY17 citations81